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Analog MEMS Accelerometer Suits Engine Anti-Vibration And Electrically Controlled Suspension Applications

10th October 2013

Murata Electronics (UK) Ltd.

Jacqueline Regnier

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Datasheet

Murata today announced the SCA720 series of analog MEMS accelerometers aimed specifically at electrically controlled suspension and engine anti-vibration applications. Measuring only 7.0 x 8.6 z 3.3 mm and constructed from a single crystal silicon, the sensor is mechanically robust and has no deformation up to 70 000g. The accelerometer’s 3D structure employs capacitive sensing techniques that give it extremely sensitive measurement characteristics and excellent offset stability. Internal inert gas damping of the MEMS sensing element provides a mechanical low-pass filter that cuts off above 115 Hz and provide a good stable amplitude output and noise filtering.

By using an analog output, the SCA720 can be placed a good distance away from the controlling unit without any interference to the sensors output. This flexibility of mounting is ideal for electrically controlled suspension (ESC) since it allows the freedom to place sensors where required rather than having to be concerned about the length of sensor connections.

Measurement of Z-axis movement is possible with Murata’s unique Z-axis sensing element when mounted flat on a PCB that is positioned in an orientation parallel to the vehicle. The sensor is earth gravity compensated with a +1 g offset where Vout is +2.5 VDC. Measurement range is 2.11g in both directions, providing a Vout in the range from 0 to +5 VDC.

To aid manufacturing and test processes, the MEMS sensor has all component, element and ASIC process and test data traceable from a 2D-matrix label affixed to the top of the device.

The SCA720 is validated to the stringent automotive component qualification standard AEC-Q100.