Plasma-Therm Announces VERSALINE RIE Etch Order

This leading international manufacturer designs, develops and produces high technology defense systems for aerospace, naval and land-based applications. The VERSALINE system, which complements other Plasma-Therm process equipment at this facility, was selected for its proven reliability and reproducibility during the fabrication of devices for mission critical components. Low maintenance and process flexibility makes the VERSALINE RIE ideally suited for multiple device fabrication steps and provides the defense industry with a valuable asset for R&D and production.

The system is configured to enhance processing technology with features including EndpointWorks™ developed by Plasma-Therm. Integration of EndpointWorks with the system’s control software provides real-time in situ process data and reproducibility.

“The VERSALINE platform has the ability to support a number of different technologies,” states Dr. David Lishan, Director of Technical Marketing at Plasma-Therm. “Leading high tech companies rely on VERSALINE systems as vital elements in their device development activities for production. With systems that operate reliably and deliver consistent, industry leading results we are able to develop long-term partnerships with our customers.”

Plasma-Therm LLC is a U.S. based supplier of advanced plasma process equipment that serves various specialty markets including MEMS, photomask, solid state lighting, thin film head and compound semiconductor. The VERSALINE system series’ customizable design matches production requirements from R&D through high volume. To meet the diverse needs of our global customers, Plasma-Therm LLC has sales and service locations established throughout North America, Europe and Asia-Pacific.