ASE Group  has installed a plasma dicing capability at its Chung-Li, Taiwan facility. Supplied by Plasma-Therm,  the Singulator MDS-100 Plasma Dicing on Tape (PDOT) production system will be available for customer demonstrations, development and prototyping in the next few weeks.

An Advanced Vacuum Apex SLR ICP (Inductively Coupled Plasma) etch system recently installed at NASA's JPL is expanding the fabrication capabilities of the site’s Microdevices Laboratory (MDL). The MDL continues to update its wafer-level plasma processing equipment set with this system, the sixth overall from Plasma-Therm and Advanced Vacuum and the third in the last two years.

Students and industry researchers involved in many aspects of nanotechnology gained a broad understanding of plasma processing at a workshop presented recently by Plasma-Therm at the University of New South Wales in Sydney, Australia.

Plasma Therm’s Advanced Vacuum division was recently selected by the University of Central Florida to provide enhanced compound semiconductor etch and dielectric deposition capabilities. UCF’s College of Optics and Photonics, provides research facilities for users from universities and industry locally and internationally from a wide range of disciplines.

Plasma-Therm has recently presented advanced plasma processing workshops at Arizona State University (ASU) and the Weizmann Institute of Science in Rehovot, Israel. Presentation topics ranged from the fundamentals of plasma processing to the advanced etching and deposition technologies used in semiconductor device fabrication, materials science and nanotechnology research.

Enabling wafer singulation processes, Plasma-Therm has entered into a cross licensing agreement with ON Semiconductor. The agreement includes cross licensing of technology that offers semiconductor manufacturers production solutions that accelerate the manufacture of next-generation devices.

A recent Plasma-Therm advanced plasma processing workshop held in Tel Aviv, Israel, was attended by over 140 engineers and scientists from throughout the country’s growing semiconductor technology sector. Twenty companies (ranging from start-ups to Fortune 500) and six world class universities participated in the full day of presentations focused on applying plasma etching and deposition to the fabrication of electronic, photonic, medical, and ...

Plasma-Therm is pleased to announce that it is now offering customers online quick, easy and secure access to Product-Specific information through a new Customer Portal. This service enhancement gives Plasma-Therm’s customers the ability to find and review work procedures for their specific system type and easily download instructions for in-house maintenance engineers.

VLSIresearch has announced that Plasma-Therm, LLC, a global supplier of plasma process equipment, has been awarded by equipment users as one of the 10 BEST 2011 Suppliers of Chip Making Equipment and one of THE BEST 2011 Small Suppliers of Wafer Processing Equipment.

PCB Piezotronics (PCB ) has expanded their sensor product line to include several MEMS devices using silicon based technology. Development and production of these sensors has relied on a Plasma-Therm VERSALINE DSE system for several critical deep silicon etching fabrication steps.

The Microelectronics Research Center (MRC), ofthe University of Texas at Austin (UT at Austin) hasrecently increased its facility capabilities by installinga Plasma-Therm VERSALINE® DSE™system.The addition of leading deep silicon etch technology enables process advances in MRC’s micro, nano and opto-electronics research.

Plasma-Therm LLC, a global supplier of plasma etch and deposition process equipment, is pleased to announce that a leading manufacturer of high technology defense systems from the EMEA region has recently accepted delivery of a VERSALINE® RIE etch system.

The Department of Physics and Technology at the University of Bergen, Norway, has recently selected Plasma-Therm and their 790+ Reactive Ion Etcher for its nano-fabrication facility.