imec and ZEISS are intensifying their collaboration by signing a strategic partnership agreement (SPA) to advance the NanoIC pilot line at imec with state-of-the-art semiconductor technology and manufacturing expertise for sub-2nm research and development.
Strong cooperation for tomorrow's semiconductor manufacturing technologies
The signed Strategic Partnership Agreement extends the existing strategic partnership between imec and ZEISS, which has been in place since 2019, until 2029. "We are very pleased to intensify our collaboration with imec to jointly advance the semiconductor technologies of tomorrow with its strong partner network," explains Thomas Stammler, Chief Technology Officer and member of the Management Team of ZEISS SMT. Since 1997, imec and the ZEISS segment Semiconductor Manufacturing Technology have been working on various joint projects to further develop Moore's Law, which continues to drive the ongoing increase in the performance of microchips and memory processors. "For the research and development of cutting-edge semiconductor technologies, the expertise and technological experience of industry partners like ZEISS is essential. Therefore, we are very pleased to strengthen our partnership even further," says Luc Van den hove, President and Chief Executive Officer of imec.
With the signed agreement, the two cooperation partners reaffirm their joint efforts to advance key semiconductor manufacturing technologies such as High-NA-EUV lithography. This technology will enable the production of even more powerful and energy-efficient microchips, which are the foundation for key technologies such as artificial intelligence, autonomous driving, Industry 4.0, and groundbreaking solutions for medical technology and the energy transition.
imec's pilot line as a research centre for the global semiconductor industry
As part of the agreement, ZEISS supports imec not only by participating in research projects to advance manufacturing, process, and measurement technologies for semiconductor manufacturing but also by providing lithography optics, integrated into the lithography scanner systems of the strategic partner ASML, of various product generations for imec's pilot line, which is an essential part of the cooperation.
Imec's pilot line, now being expanded with the NanoIC pilot line, operated in Leuven, Belgium, encompasses the entire value creation process as well as various technology strands for semiconductor manufacturing. It aims to provide industry representatives such as end customers, suppliers, and research institutions access to pioneering and advanced semiconductor technologies and platforms, enabling them to explore, develop, and test innovations. The optimisation of existing equipment, processes, and measurement methods is also being advanced to enable ever smaller, more powerful, and energy-efficient microchips, thereby driving global digitalisation. The collaboration is deepened through ZEISS's involvement in various industry partner programs, such as Advanced Patterning, 3D System Integration, and Optical Interconnect, under the leadership of imec. In these programs, work is being done together on the latest process and inspection methods for process optimisations of next-generation semiconductors.
Investments in line with the European Chips Act
The close collaboration between imec and ZEISS aligns with the goals and ambitions of the European Union and the European Chips Act, which aims to strengthen Europe's technological sovereignty, competitiveness, and resilience. "With the investments in imec's pilot line, now being expanded with the NanoIC pilot line, ZEISS is significantly contributing to maintaining Europe's lead in the latest generation of semiconductor equipment and further expanding it through the development of technology roadmaps," says Stammler. The strengthened cooperation between the two partners also sends a signal regarding the relevance of cross-industry networking for the global semiconductor market: “This strategic partnership between imec and ZEISS underscores how strong cohesion among European partners, which is crucial in setting up the NanoIC pilot line, the most advanced infrastructure for sub-2nm research and development in the world, accelerates innovation and strengthens Europe’s leadership position in the semiconductor ecosystem," says Van den hove.
