Plasma processing workshops held

More than 100 people attended the workshop at ASU, which was hosted by the university’s Ira A. Fulton Schools of Engineering and the Center for Solid State Electronics Nanofab. Attendees’ interests spanned many disciplines enabled by plasma technology, including MEMS, bio-sensing, solid-state lighting, power, photonics and other nanotechnology areas. 

“We were very happy to have Plasma-Therm offer their workshop at ASU and the attendance was very encouraging. Dr. Lishan gave an excellent presentation, educating the audience about plasma deposition and etching technologies, which are of great importance to those of us working on cutting-edge semiconductor technologies,” commented Prof. Srabanti Chowdhury, School of Electrical, Computer and Energy Engineering, ASU.

Omid Mahdavi, Manager, Micro/Nano Fabrication Center, The University of Arizona, said: “I found the workshop and the presentation to be comprehensive and lucid. It’s a great refresher for those familiar with the concepts and a great introduction for those just getting into the field.”

Dr. David Lishan, conference organiser and speaker, commented: “It is rewarding to know that these workshops benefit the technical community. This particular event drew attendees from as far away as the University of Arizona and Georgia Institute of Technology. More impressive is the diversity of research areas gathered around the central theme of plasma processing. I believe the opportunity to interact at the workshop is beneficial to both academic and industrial communities.”

Over 50 researchers attended the workshop at the Weizmann Institute of Science, which was organised in cooperation with institute’s Chemical Research Support Department. Workshop participants came from multiple universities and companies, and represented interests spanning fundamental to applied research. Attendees actively investigated research and development in devices and structures for which plasma processing technology is often a critical step, including MEMS, waveguides and dielectric deposition.

Plasma-Therm has presented the in-depth plasma processing workshop at more than 20 institutions in the United States, Sweden, Israel, South Korea, Taiwan, Singapore, China, and other countries.

Dr. Ora Simcha Bitton, Head of Nanofabrication Unit, Chemical Research Support Department and workshop host, said: “The workshop was very comprehensive, with important knowledge presented clearly. We are pleased that Plasma-Therm and their representative, PicoTech, provided this opportunity for us to learn in Israel.”

An attendee, Dr. Moshe Oron from Soreq NRC, commented: “As a physicist that is using RIE and PECVD processes for many years, I enjoyed very much the talks on the various topics which gave me better understanding of the physics and chemistry going on, and will certainly be useful in future improvement of our processes.”

Dr. David Lishan, Principle Scientist, Plasma-Therm, and workshop speaker, said: “It is pleasing to return to Israel for a second workshop. Clearly there is enthusiasm to learn about plasma processing across many fields of research. Bringing researchers together to exchange experiences and facilitate collaborations in this workshop format has been constructive and on a personal level very rewarding.”