X-FAB Expands MEMS Manufacturing Capabilities

27th June 2014

Staff Reporter

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X-FAB Silicon Foundries has announced it has reached a major milestone in further expanding its MEMS manufacturing capabilities in two of its German locations, Erfurt and Itzehoe. Driven by increased customer demand for MEMS manufacturing services, the expansion includes two new dedicated MEMS fabs with cleanroom space totaling more than 2,000 m2.

MEMS devices manufactured at X-FAB include pressure sensors, micro-mirrors, microphones and microfluidic devices used in mobile, consumer, medical and automotive applications. Customers requiring CMOS and MEMS solutions also benefit from access to X-FAB’s existing CMOS wafer fabrication facilities.

“These two expansions come at an exciting time for X-FAB as the MEMS industry continues to grow,” said Dr. Peter Merz, MEMS Business Unit Manager at X-FAB. “With the two new dedicated MEMS fabs, we are well prepared for volume MEMS manufacturing and able to meet the growing demand we see from our customers.”

In Erfurt, X-FAB will access 1,300 m2 of new manufacturing space dedicated for MEMS operations alongside its existing CMOS and MEMS semiconductor fabs on site. The new cleanroom will be used for high-volume manufacturing of 200mm MEMS and related processes with the first equipment to be installed in December this year.

In Itzehoe, X-FAB is moving its operation into a new state-of-the-art 1,000 m2 fab commonly used with Fraunhofer ISIT, a renowned research institute for microelectronics and microsystems technology also located in Itzehoe. The new 200mm fab enables X-FAB to increase manufacturing capacity and expand its process capabilities. In addition, X-FAB will expand its R&D cooperation with Fraunhofer Institute. The Itzehoe fab was officially opened on May 28, 2014 with the first tools already installed.
Dr. Merz added, “X-FAB offers its customers a great variety of CMOS processes for analog/mixed signal, high-voltage and power applications in unique combination with a wide range of MEMS process capabilities. Customers benefit from this one-stop-shopping approach by getting outstanding quality and high-volume manufacturing service. In addition, X-FAB simplifies the supply chain by supporting integration and interface challenges on all levels.”