Semiconductor Device Analyser Enhancements Speed Pulse Measurement

The latest EasyEXPERT 5.5 software enables remote test without complex programming, using more than 300 ready-to-use application tests in addition to manual operation.

The new B1500A supports all aspects of characterization for IV (0.1fA – 1 A/0.5 µV – 200V), capacitance (1 kHz – 5 MHz) and ultra-fast pulsed/transient IV measurement down to ns order.

The enhanced analyser enables a pulsed measurement down to 50µs pulse width, a 10X or more narrow pulsed measurement than provided by a comparable conventional SMU. In addition, the instrument offers wider range and versatility, up to 30 V / 1A, with voltage/current programmability. Pulsed IV measurements are typically required to characterise today’s advanced materials and devices. The EasyEXPERT oscilloscope view is supported for the B1514A to monitor the actual voltage and current waveform.

Very low current measurement down to 0.1fA at lower cost is a feature, using the new B1511B medium-power SMU with an atto-sense and switch unit. This meets the requirements for accurate low-current characterisation, such as leakage current, in order to accelerate research and development for next-generation devices.

Device characterisation is available with EasyEXPERT 5.5. The updated software features remote control to execute the built-in application test, GUI to control switching matrix, and extension of the application library.

In addition, it supports the oscilloscope view for the B1514A 50 µs pulse medium-current SMU. EasyEXPERT is GUI-based software operating on Windows 7; it offers efficient and repeatable device characterisation ranging from interactive manual measurements to semi-automated wafer test.