Air monitoring sensors use MEMS thermocouples

The vertical-mount FS1015 and the surface-mount FS3000 provide precision air flow monitoring for detecting system failures, measuring air handling, controlling fan speed, and more in HVAC systems, analytic gas-monitoring systems, data centres, and air quality systems.

Both sensors use a series of MEMS thermocouples to provide high-sensitivity air monitoring. They measure direct local air at up to 15 meters per second, allowing system control to adjust quickly, providing closed-loop control while achieving maximum efficiency and cost savings. The solid thermal isolation of the MEMS sensing element combined with a silicon-carbide film offers excellent abrasive wear resistance and long-term reliability.

The FS1015 comes in a 28.2 mm × 14.2 mm × 7.3 mm package with leads for vertical mounting and screw-secured side tabs.

The FS3000 module is available in an 8.0 mm × 9.1 mm × 4.4 mm surface-mount package ideal for low-profile applications.