Integrated Test Systems for Faster and Easier Semiconductor Testing

Keithley's Model 4200-SCS Semiconductor Characterization System features I-V source-measure and specialized pulse testing packages, such as the Model 4200-PIV package for testing of advanced semiconductor materials.

Series 2600 SourceMeter Instruments feature TSP-Link(TM) and Test Script Processor (TSP)(TM) for scalable I-V channel count systems, fast parallel measurements, and complex test sequences for applications such as on-the-fly NBTI or on-wafer component characterization.

Series 2400 SourceMeter Instruments feature high voltage and high current sourcing, which are unique in applications such as high power MOSFETs and display drivers. Optional switching, C-meters, and pulse generators round out the instrument capabilities of ACS integrated test systems.

ACS integrated test systems are available in basic bench-top configurations or in factory-integrated full-height rack configurations.

Semiconductor test engineers face a number of testing challenges. On one hand, a range of unique measurements and novel techniques are necessary for emerging technologies such as scaled CMOS, LDMOS, and advanced memory technologies. On the other hand, new technologies demand more testing and data collection with less time and fewer resources. Until now, semiconductor test engineers have primarily relied on instruments that offer flexibility and unique measurements but require in-house or third party software development that impacts their company's time-to-market and
increases overall cost of test. Keithley's ACS integrated test systems address these needs by capitalizing on the flexibility and unique measurement capabilities of instruments and by providing the necessary software for flexibility and automation. Keithley's new ACS systems are
ideal for semiconductor parametric characterization in R&D, technology development (TD), quality / reliability assurance (QRA), and small-scale production test.

Automation at the wafer or cassette level enables more unattended testing and collection of large statistical data samples for modeling and process qualification, as well as maximizing tool utilization. At the wafer level, Keithley's ACS integrated test systems feature a Wafer Description Utility
and wafer map. Users can easily build wafer description files with integrated test plans. Color-coded wafer maps are updated in real-time during test execution to show pass/fail metrics, providing clear visibility into test results and assuring that test outcomes will be productive.

Another innovation is an interactive prober controller. This allows users to control wafer movement using the ACS software during test development to validate test setups on actual structures and during lot disposition to navigate to a problem area of the wafer and execute testing manually. A
full range of drivers offers seamless integration with a range of semiautomatic and fully automatic probers. Keithley's ACS integrated test systems are configured and integrated with Keithley's semiconductor applications expertise and customization capability. This includes test routines such as macros, scripts, and custom GUIs in addition to interconnects, including cables, switching, probe card
adaptation, as well as installation, training, and applications services.