MEMS Absolute Pressure Sensor for Healthcare and Wearable Devices

The sensor's high accuracy makes it well-suited for use in activity monitors for healthcare and wearable devices monitoring precise altitudinal variation. The sensor's power efficiency also makes it well-suited for use in battery-operated applications.

Through the integration of CMOS circuits and MEMS sensors, Omron has been able to create an absolute pressure sensor measuring only 3.8x3.8x0.92mm, making it suitable for installation in small mobile devices and other compact hardware.

Installing the pressure sensors in activity monitors will make it possible to calculate more accurate calories taking into account the altitudinal variation involved in one's daily activities and exercise such as climbing up and down stairs or hills, etc.

The sensor's power efficiency also makes it possible to extend battery life of equipments such as activity monitors.

Installing the pressure sensors in fitness devices, smart watches and elderly care equipments makes it possible to identify human actions such as stand up, sit down, lie down and drop down by precise measurement of the altitudinal variation.

Installing the sensors in navigation systems will make it possible to use indoor in addition to more accurate positioning by backing up GPS.

The sensors are also suited for weather monitoring equipments, smart phones and tablets in which pressure sensors are now in widespread use.

Features:

-Able to detect the relative difference of approximately 6Pa in air pressure that exists between 50cm variations in altitude.
-High resolution of 0.06Pa (5mm equivalent)
-Subminiature dimensions (3.8x3.8x0.92mm).
-Thanks to integration of CMOS circuitry and MEMS sensors, chip size is only 1.9x1.9x0.5mm.
-Wide detection range of 300 to 1100hPa.
-Low current consumption of 0.5 to 9.0uA: suitable for use in battery-operated devices (current consumption levels are dependent on measurement conditions and operating modes).
-A built-in temperature sensor can be used to adjust measurements to compensate for air pressure fluctuations that are due to changes in air temperature.
-I²C output, serial communications compatible.

Technological features

Thanks to the semiconductor circuit design technologies, CMOS process technologies, and MEMS technologies that Omron has cultivated over many years, the company has also been able to integrate pressure sensors, analogue amplifier circuits, digital processing circuits, non-volatile memory, etc. on single chips.

The company has also been able to reduce chip size, increase chip functionality, and enhance chip noise immunity, and through the use of MEMS bonding technology, they have been able to create a large vacuum chamber inside the body of the sensor chip to maximize the sensor's input dynamic range, and thereby increase the sensor's sensitivity.

Specifications