Capacitive MEMS accelerometers provide reliable results

27th January 2015

Barney Scott

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Datasheet

A family of analogue surface mount Leadless Chip Carrier (LCC) MEMS variable capacitive accelerometers has been announced by ETLG Inertial Aerosystems, targeting markets including aerospace, automotive, energy, industrial, oil & gas and test & measurement. The Model 1510 series accelerometers offer reliable general purpose vibration measurements, with excellent long-term stability.

Incorporating a micromachined variable capacitive sensing element and custom IC, the accelerometer produces two analogue voltages which vary proportionately according to measured acceleration levels.

The units respond to either AC or DC acceleration, with choice of either +4V differential or 0.5-4.5V single ended outputs. Both outputs read nominally at +2.5V at 0m/s². Two reference voltages of +5.0 and +2.5V (nominal), are required, and the output scale factor is directly proportional to the +5VDC 6mA (typical) reference voltage.

Each unit's sensitive axis is perpendicular to the bottom of the LCC package. Units are RoHS compliant and can reliably operate over a standard temperature range of -40 to +85°C. As a MEMS-based device, the Model 1510 Series is also insensitive to temperature changes and gradients, with a signal output that is further unaffected by electromagnetic interference, and requiring no warm-up period.

Units are available in 5 standard measurement ranges from ±5 to ±100g, with corresponding nominal frequency response from 0 to 600Hz (±5g) to 0 to 2500Hz (±100g).

Designed by Silicon Designs, the accelerometers are packaged in the 8mm square SMD configuration and are nitrogen damped and hermetically sealed. Low-to-medium sized quantities of the Model 1510 Series are available for customer shipment. OEM volumes are available from three weeks after receipt of an SDI acknowledged purchase order.