Piezo nanopositioner with high-dynamics and resolution

27th July 2016

Daisy Stapley-Bunten

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The piezo nanopositioning stage of Aerotech’s QFOCUS QF-46 series enables microscope objective and optics positioning at high-speeds with nanometre-level performance. It is available in closed-loop travels of 100 and 250μm, and open-loop travels of 120 and 300μm. The QF-46 is designed with next gen optical instruments and laser machines in mind.

The QF-46 can perform better than competitive offerings with larger and heavier higher Numerical Aperture (NA) objectives due to its higher inherent stiffness. It is perfect for any demanding optical application requiring high precision and throughput with long travels.

Precision mechanical structure
QFOCUS QF-46 is guided by precision flexures that are optimised using finite element analysis to ensure high-stiffness and long device life. The resulting design offers outstanding stiffness and resonant frequency enabling high process throughput and fast closed-loop response. In addition, the QF-46 has been designed to provide excellent geometric performance (straightness and angular errors) for critical microscopy and optics positioning applications.

High-resolution and positioning accuracy
QF-46 piezo stages have the option of closed-loop feedback (-C) using a unique capacitive sensor design that results in sub-nanometre resolution and high linearity. The capacitive sensors measure the output of the positioning carriage directly, enabling superior accuracy and repeatability.

When coupled with Aerotech’s Q-series controllers and drives, the QF-46 demonstrates sub-nanometre positioning resolution (0.30nm closed loop and 0.15nm open loop), in-position stability (jitter), and high-positioning bandwidth. Software options such as Aerotech’s Dynamic Controls Toolbox and Motion Designer packages provide advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping to improve tracking errors and step-and-settle times.

Flexibility
QFOCUS QF-46 is available with threaded adapters to fit most microscopes and objectives. The microscope turret mounting allows easy and fast positioning at the desired orientation. Tapped holes on the stage body provide alternative mounting for custom interfaces in machines or other optical instruments. The QF-46 is available with a clear aperture up to 29mm. Custom stage designs, travels and threaded adapters are available.