Optoelectronics
Coherent Launches Higher Power UV Ultrafast Laser for Industrial Applications
Coherent, Inc has expanded their family of industrial ultrafast lasers with the Talisker 500, which delivers over 10 Watts of ultraviolet output at 355 nm, 15 Watts of green output at 532 nm or 25 Watts of infrared output at 1064 nm. This next generation Talisker laser also increases repetition rate to 500 kHz enabling even higher throughput rates than earlier models. The combination of short (10 ps) pulse duration and flexible wavelength options makes the Talisker 500 ideal for precision micromachining applications in microelectronics and other industries where any peripheral laser damage – the heat affected zone (HAZ) – must be completely avoided, but throughput is key. Moreover, the rugged, compact (1020 mm x 390 mm x170 mm) laser head, power supply and control interfaces mirror those of the current Talisker Ultra revision, simplifying integration and/or upgrade to this new performance level.
The Talisker 500 is ideal for precision, high-throughput micromachining applications in several industries, particularly those involving delicate, thin film and/or “hard, wide bandgap” materials such as glass and ceramics. Examples in the semiconductor industry include silicon scribing and dicing, drilling of through silicon vias, and scribing of low κ dielectrics. In LED fabrication, the laser’s performance is ideal for scribing sapphire substrates, while in solar and other industries; the absence of any HAZ makes the laser’s machining characteristics well-suited for scribing various thin films, including transparent conductive oxides (TCOs).