Hard-coats for ESCs extend life
To extend the life of alumina or beryllia ESCs (electrostatic chucks), Morgan Advanced Materials has released the Diamonex technical hard-coats. Made of diamond-like-carbon (DLC) and other nanocomposite materials, the films are adjusted to meet resistivity requirements of the ESC while protecting electronic layers.
The Diamonex technical hard-coats, suitable for semiconductor, solar and LED applications, has a broad range of chemical resistance. In addition to this, the films meet chamber process compatibility requirements and can withstand high-temperature heated chuck applications.
The hard-coats, available for CVD, PVD, etch and ion implant processes, can be applied to new or refurbished ESCs. This also includes ESCs originally designed without a sacrificial wear layer. The films can be used in most high temperature processes and feature mesa patterning for low defectivity.
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