Hard-coats extend the life of ESCs
To extend the life of alumina or beryllia electrostatic chucks (ESCs), sacrificial wear layers have been released by Morgan Advanced Materials. The Diamonex technical hard-coats, which are applied as a final protective layer, extend the life of ESCs for semiconductor, solar and LED applications.
Comprised of diamond-like-carbon (DLC) and other nanocomposite materials, these hard-coats are designed to meet the resistivity requirements of the ESC while protecting electronic layers. The hard-coats, which meet chamber process compatibility requirements, have a broad range of chemical resistance and can withstand high-temperature heated chuck applications.
Suitable for use with new or refurbished ESCs, which may or may not have been designed with a sacrificial wear layer, the hard-coats are available for CVD, PVD, etch and ion implant processes. Featuring mesa patterning for low defectivity, the Diamonex technical hard-coats are also suitable for high temperature processes.
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