Mems Accelerometers For High Temperature Applications.

These integrated accelerometers are in a miniature, 8mm square, hermetically sealed package, which combines a micromachined capacitive sense element with a custom integrated circuit that includes a sense amplifier and a sigma-delta A/D convertor. In the case of the low noise analogue device, a sense amplifier and differential output stage is included. All products are relatively insensitive to temperature changes and thermal gradients and every model has a serial number on its bottom surface for traceability. Commercial, upscreened and Mil-spec versions are available.

Full scale ranges of + or - 2g to 400g are standard and every device responds to DC and AC acceleration. Ideal where space and weight are at a premium, the units survive 2000g shock.

Applications also include Machine control, Robotics, Instrumentation, Crash testing, Vibration monitoring and analysis, whilst the low noise analog products are ideal for Seismic monitoring and Earthquake detection.