Output couplers for excimer lasers

High power dielectric coatings are manufactured for the wavelength range 248nm to 3000nm in house.

Output couplers are used predominantly in resonators to extract the laser beam, as well as in attenuation. For excimer laser applications, standard mirror coatings are applied to fused silica substrates for optics outside of the resonator. For mirrors inside the resonator the coatings must be chlorine and fluorine resistant due to their exposure to the gas. In which cases we use CaF2 or MgF2 for the substrate material.

The degree of reflectivity can be defined by the customer along with all other parameters, and AR coatings are typically applied to the rear surface to minimise transmitted beam losses.