Film thickness gauge is compact for easy integration

2nd April 2015

Barney Scott

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Datasheet

Hamamatsu Photonics K.K. has developed a noncontact film thickness measurement system utilising spectral interferometry, the Optical NanoGauge C13027, which offers easier integration into inline manufacturing equipment thanks to its reduced size and compatibility with automation controllers. The system’s footprint is roughly 30% smaller than previous systems of the same type.

Furthermore, the Optical NanoGauge C13027 can help improve quality control with the inclusion of a colour measurement function that checks the evenness of colours of films and flat panel display during thickness measurement. The Optical NanoGauge C13027 also provides double the measurement speed of previous systems, making rapid measurements up to 200Hz, and is suitable for measurements on highspeed production lines.

The C13207 not only supports PLC connections but is also more compact than Hamamatsu's other models for easy installation into equipment. The Optical Gauge series is capable of measuring the thickness of extremely thin films down to 10nm as well as covering a wide range of film thickness from 10nm up to 100μm.

From the 1^st April 2015, the Optical NanoGauge C13027 will be available to manufacturers of systems for the fabrication or inspection of films, flat panel displays, semiconductor coatings, and thin film deposition. From 8^th to 10^th April 2015, the Optical NanoGauge C13027 will be exhibited at FilmTech Japan, a specialised trade show within the Highly-functional Material World 2015 exhibition to be held at the Tokyo Big Sight convention centre.