RIBER launches MBE 8000 for mass epiwafer production
RIBER, the global specialist for molecular beam epitaxy (MBE) equipment serving the semiconductor industry, is pleased to announce the final qualification of its MBE 8000 production platform by leading US epiwafer manufacturer.
A new competitive edge for our customers
The MBE 8000 delivers twice the productivity of existing products on the market while enabling outstanding performances. The flexibility of MBE technology enables RIBER’s MBE 8000 to address all compound semiconductor growing markets from VCSEL, transistor, sensors requiring high level of performances in terms of uniformity, reproducibility, and stability.
This system is capable of growing batches of eight 150mm (6”) or four 200mm (8”) wafers, increasing capacity by 50% over the existing products. As cell design, system geometry, process control are identical, it ensures process transfer within a minimum of time and an easy handling for Riber machines operators.
The final qualification step has validated the MBE 8000 in terms of process, robustness, stability, ergonomics, and control. As an example, defect density over 30 runs measured is less than 50 particles per cm² measured on a VCSEL-type structure and on particles in the size of 0.8–8µm.
With an optimum cost of ownership and large capacity, the MBE 8000 system presents strong prospects for business development in the future.