Trelleborg showcases capabilities at Semicon Taiwan 2023

Featured on the Trelleborg stand is Isolast PureFab JPF40, an ultra-high temperature perfluoroelastomer (FFKM) developed for demanding subfab applications and thermal processes, including rapid thermal processing (RTP), atomic layer deposition (ALD), and oxidation. It offers compression set performance at operating temperatures from +200°C/+392°F to +300°C/+552°F. This ensures sealing integrity for critical processes, withstanding peak application temperatures over +325°C/+617°F, the highest temperature capability of an elastomer material.

Isolast PureFab JPF22 is an all-around FFKM seal with superior chemical compatibility suitable for a wide range of semiconductor applications. The material offers excellent resistance to wet process chemicals and steam, as well as amine-based ALD precursors.

Ethan Huang, Semiconductor Segment Manager, Trelleborg Sealing Solutions, says: “Reliable sealing solutions are essential to prevent premature failure with the increasingly extreme temperatures and more aggressive chemical precursors used in semiconductor environments. At Semicon Taiwan we will be featuring the latest additions to our PureFab range which are specifically engineered to address the challenges of critical semiconductor sealing environments.

“Trelleborg offers customers premium engineering capabilities to develop the right custom solutions for today’s increasingly extreme fab and sub-fab environments, including the unique ability to model compression set data using finite element analysis. This step change in technology enables engineers to predict seals’ usable lifetime more accurately as they design and manufacture finished products.”

Trelleborg’s stand also features the Isolast K-Fab Flange Seal for critical subfab applications, which is temperature resistant for use up to +327°C/+620°F dependent on the material selection. It can be manufactured from a range of elastomer materials including Isolast FFKM, Isolast PureFab FFKM, PureFab Fluoroelastomer (FKM) for ultra-high purity, and standard FKM, and is suitable for combination with both aluminum and stainless steel. Visitors can view the seal and check the profile details of their seal designs with a 3D printing model.

In addition Trelleborg is showcasing the Turcon Variseal NW, part of the Variseal range of spring-energised seals field-proven in extreme gas and liquid handling situations, including high vacuum and corrosive environments. The Turcon case of flange seal encompasses an energising spring that prevents possible contact between the spring or spring cavity and system media. It operates in extreme temperatures from -253°C/-423°F to +260°C/+500°F, is vacuum-capable in air to 10-9mbar/l/s, and has excellent wear and friction characteristics. Compatible with virtually all media and gases including fluorine at high temperatures, it is available in custom sizes and standard dimensions with easy retrofit of current NW elastomer seals.

Trelleborg will also demonstrate its extensive and rigorous engineering capabilities, including the unique ability to model the compression set of elastomers to predict seal lifetime using finite element analysis (FEA) for its semiconductor customers. This approach enables engineers to capture more accurate seal compression set data compared to the industry standard simulation compression set tests, allowing for more accurate predictions about seal longevity. Our extensive ability to work with customers to develop custom seals for specific applications will also be highlighted.

Trelleborg welcomes visitors to our stand for a discussion of their semiconductor sealing needs with General Manager Kevin Lai, Semiconductor Segment Manager Ethan Huang, and Sales Engineer Rex Chiang.