Onto Innovation wins 2022 Best of West Award for Atlas V optical critical dimension metrology tool

Onto Innovation names itself a leader in process control, including un-patterned wafer quality, 3D metrology, macro defect inspection of wafers and packages, metal interconnect composition, factory analytics, and lithography for advanced semiconductor packaging.

Presented by SEMI and Semiconductor Digest each year, the Best of West award recognises innovative new products or services that are significantly advancing the electronics manufacturing supply chain or a particular manufacturing capability.

The Atlas V metrology system is designed to measure several key steps that include buried features not visible by CD-SEM and other techniques. Through improvements in the optical systems, mechanical sub-systems and software algorithms, the Atlas V system can precisely measure the very subtle variations for device parameters and reveal weak process corners for engineers to improve fab process robustness.

The Atlas V metrology system enables these critical dimensions to be measured with high accuracy and sensitivity, extending the capability of optical solutions for future generations of devices and eliminating the need for slower process control techniques.

The Atlas V technology enables the performance needed for customers’ development of GAA/3D NAND/DRAM and is over 100 times faster than X-ray solutions for these structures. Select Onto Innovation customers have validated the new optical critical dimension (OCD) technology and have appreciated the speed and resolution that was once thought to be beyond the limits of optical technology.

"Semiconductor manufacturers rely on the ingenuity of equipment suppliers such as Onto Innovation to make chips smaller and faster,” said Pete Singer, Editor-in-Chief of Semiconductor Digest. “The Atlas V is a great example of a product that meets the needs of next-generation semiconductor devices, such as the gate-all-around transistor.”

Onto Innovation will receive the Best of West award at SEMICON West 2022 Hybrid.