Large particle sensing at SEMICON West
CyberOptics will showcase its next-generation Advanced Airborne Particle Sensors at the SEMICON West 2016 (July 12-14). The current product portfolio has improved equipment set-up and long-term yields in semiconductor fabs by wirelessly monitoring airborne particles in real-time. The next-generation APS2 provides greater versatility, with better accuracy and sensitivity welcomed by semiconductor fabs and equipment OEMs worldwide.
The new large particle detecting and measurement functionality covers a range of sizes with four bins for particles larger than 2, 5, 10 and 30 microns.
“We’ve evolved our widely adopted APS technology portfolio to include large particle measurement capability in the same devices our customers are routinely using to detect and measure small particles,” said Subodh Kulkarni, President and CEO of CyberOptics. “Equipment and process engineers can speed equipment qualification, shorten maintenance cycles, and lower equipment expenses with objective and reproducible data – saving our customers time and money with a dual particle measurement capability.”
CyberOptics will also demonstrate its WaferSense and ReticleSense Auto Multi Sensors (AMS/AMSR) that measure leveling, vibration, and relative humidity (RH) in an all-in-one wireless real-time device.
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