Software aimed at wafer-level component characterisation

High-volume wafer-level measurements are no longer exclusive to the semiconductor foundry production floor. Today, many R&D teams measure high-volume data for applications such as device modelling, process monitoring, reliability and component characterisation; often at different temperatures. As a result, automated probers are becoming standard in R&D device characterisation labs.

The software can now be integrated with Cascade Microtech’s Velox 2.0 probe station control software. WaferPro Express and Velox 2.0 are integrated through Cascade Microtech’s WaferSync, a jointly developed two-way communication link.

The link allows for complete wafer map synchronisation, which enables easy and error-free information exchange between the software, including wafer alignment, sites and die information.

The link to Velox 2.0, coupled with major usability improvements, allows test engineers to quickly setup measurement systems. To further maximise efficiency during RF measurement, the software periodically monitors the stability of the RF calibration. This minimises the time spent collecting inaccurate data.

A typical Wafer-Level Measurement Solution (WMS) configuration for DC/RF measurements includes a Keysight PNA or NA-X network analyser and a B1500A semiconductor device patameter analyser integrated with a Cascade Microtech wafer probe station, WinCal XE calibration software and Impedance Standard Substrates for calibration.

WMS configurations are pre-verified and optimized for accurate and repeatable device and component characterisation. Verification of newly installed systems is performed using the new Keysight Verification Substrate (KVS).

Each KVS is fully characterised at the factory and features standard devices that engineers can probe with G-S-G probes after RF calibration.

WaferPro Express 2015 measures the KVS during initial system verification procedure. Then, by comparing measured and factory data, it certifies the system’s proper operation.

Other new features in the software include support for noise figure measurements and the ability to import test routines developed using Keysight IC-CAP modelling and measurement software.

The new noise figure measurement capability further complements the software’s existing gain compression, two-tone intermodulation distortion and S-parameter measurements currently available in the latest Keysight PNA-X instrument driver.