Airborne particle sensors on show at SEMICON Taiwan

The new large particle detecting and measurement functionality covers a range of sizes with four bins for particles larger than 2, 5, 10 and 30 microns.

CyberOptics’ APS2 portfolio speeds equipment set-up and long-term yields in semiconductor fabs by wirelessly monitoring airborne particles in real-time. The next-generation APS2 provides even greater versatility, with the industry-leading accuracy and sensitivity valued by semiconductor fabs and equipment OEMs worldwide. 

“We’ve taken the Best Known Method for wireless particle measurement in semiconductor fabs and made it even better,” said Ferris Chen, Director of Sales, CyberOptics, Asia. “We’ve extended the APS2 technology to include large particle measurement capability in the very same device that our customers use to save time, save expense and improve yields.”

At SEMICON Taiwan, CyberOptics will also demonstrate its WaferSense and ReticleSense Auto Multi Sensors (AMS/AMSR) that measure leveling, vibration, and relative humidity (RH) in an all-in-one wireless real-time device.  The thin and light form factor enables the AMS to travel through virtually any tool and the AMSR can capture multiple measurements in all locations of the reticle environment.  The all-in-one devices are yet another way to increase yield and reduce downtime in semiconductor environments.