Onto Innovation metrology system wins Best of West Award 2023

Presented by SEMI and Semiconductor Digest each year, the Best of West award recognises innovative new products or services that are significantly advancing the electronics manufacturing supply chain or a particular manufacturing capability.

The Echo opto-acoustic metrology system delivers non-destructive wafer-level metrology for measurements of single and multi-layer opaque films ranging in thickness from 50Å to 35µm. It uses Picosecond laser ultrasonic (PULSE) technology, a semiconductor industry workhorse for over 20 years that provides comprehensive metal film thickness metrology.

“The Echo system provides metal thickness and characterisation for a variety of devices, including RF filters for 5G communications, and power devices for the rapidly growing electric vehicle (EV) and high-speed portable charger markets,” said Pete Singer, Editor-in-Chief of Semiconductor Digest. "Congratulations to Onto Innovation for winning the Best of West competition two years in a row.”

The company’s Atlas V Optical Critical Dimension Metrology Tool won the award in 2022.

Onto Innovation works in process control, combining global scale with an expanded portfolio of technologies that include:

• Un-patterned wafer analysis
• 3D metrology spanning chip features from nanometre scale transistors to large die interconnects
• Macro defect inspection of wafers and packages
• Metal interconnect composition
• Factory analytics
• Lithography for advanced semiconductor packaging