ULVAC has announced a low temperature PZT sputtering technology in mass production scale, enabling next-gen MEMS devices integrated on CMOS. Today, sensors such as accelerometers, gyros and pressure sensors are widely used inside smart phones, tablets and vehicles, enabled by the piezoelectric MEMS device using thin film PZT (lead zirconate titanate, Pb(Zr,Ti)O3).

ULVAC, Inc. announces that it has developed a new system to enhance its ENTRONTM-EX W300 300mm system series, which has a proven track record at plants mass producing semiconductors worldwide. The newly-developed ENTRONTM-EX2 W300 CVD-Ni/CVD-Co system offers CVD-Ni and CVD-Co processing for 3D devices. Its processing capabilities vastly improve productivity and enable greater investment efficiency.

ULVAC-RIKO,Inc. has developed a system called Laser Flash Method Thermal Constant Measuring System TC-1200RH, which enables stable measurement in low temperature ranges and drastically cut down the measurement time, and will launch the sales on November 17, 2011.

ULVAC, Inc. introduces the SM2, a transducer type multi ionization gauge which can connect gauge heads with different measurement ranges. ULVAC also releases, the UNECS-3000A, an automatic high-speed spectroscopic ellipsometer which can measure the thickness of a thin film, as well as, optical constant. Finally, ULVAC announces the launch of the VFR-400 and VFR-500, large pendulum valves for FPD manufacturing equipment, used in markets such as or...

Reliance Electric is pleased to announce that it has developed the MSC9000 that has a new concept of a surface defect detecting system for the steel plate industry. Sales of the product will begin in October. This new product reflects both the control technology that the company has created from its own line drive applications as well as the techniques for user operation that the company has learned from design applications.

ULVAC, Inc. is pleased to announce that we have developed and commercialized large pendulum valves VFR-400 and VFR-500 for FPD manufacturing equipment such as organic EL (electroluminescent) manufacturing equipments and large vacuum equipments which will go on sale in September 2011.