Expanding its IntelliGen family of two-stage dispense technologies used in microelectronics manufacturing processes, Entegris has introduced the IntelliGen MV. This builds upon the performance of the IntelliGen Mini and HV dispense systems with a solution optimised for 3D and MEMS applications, enabling high-purity filtration and repeatable dispense of mid-viscosity fluids.

An 'ultra clean' liquid filtration solution for use in the semiconductor manufacturing process has been released by Entegris. The Torrento X Series is the first commercial, non-dewetting, all PTFE filter with 10 nm particle retention for advanced wet etch and clean applications.