Beneq and Lotus Applied Technology today announced that they have signed a licensing agreement using Lotus Applied Technology’s Vortex ALD (Atomic Layer Deposition) technology. Beneq will be using the technology developed by LotusAT in new rotary spatial ALD equipment that provides low process cost and high productivity in industrial ALD applications, such as barrier, passivation, insulation and protection applications for MEMS, LED, O...