Axcelis Technologies today announced the introduction of the Purion XE next generation single wafer high energy implanter, the second tool in its expanding family of Purion ion implanters. The Purion XE is an evolution of the industry leading Optima XEx, combining the process and productivity advantages of the Optima XEx linear accelerator and beamline technology with the reliability, precision, process flexibility, and performance options that d...

Axcelis Technologies announced today that it has signed a five year, comprehensive global support contract with one of the world's leading semiconductor manufacturers valued at $30 million. Axcelis' award winning Global Support Solutions program is designed to optimize all aspects of manufacturing performance throughout the fab cycle, enabling customers to achieve their business goals.