Wafer fab study brings reduction in CO2 emissions

Supported by funding from The Carbon Trust and the wafer fab operators, the study determined that almost half of the emissions reduction could be achieved through no-cost or low-cost measures. Many of the study’s recommendations are expected to be implemented by the end of 2007.



Strict control of temperature, humidity and particulates in clean rooms means that air conditioning plant typically consumes about a third of all site energy usage. The study found that at sites already operating at high levels of efficiency, savings of 2-3% could still be achieved, while in other cases, savings of greater than 10% of total site energy could be achieved.



Acting for the NMI, specialist consultants CH2M HILL IDC conducted a technical survey of each site and constructed a thermodynamic model of the air conditioning systems. The model provided the means to compare parameters derived from on-site measurements with IDC’s database of similar facilities in other parts of the world. It was then possible to quantify the extent to which potential savings could be achieved.



The NMI’s CEO, Derek Boyd commented, “The energy savings and resulting reduction in CO2 emissions identified by the air conditioning study is great news for the climate change initiative. The study has created a new level of understanding of the issues involved and there will be a concerted effort to maintain the awareness stimulated by the project to ensure that these very encouraging findings are converted into maximum emissions reductions.”



“While the NMI’s Carbon Trust funding has been fully utilised in this project, the project has sufficient potential to be applied across other semiconductor sites and other industry sectors that also rely on stringent cleanroom conditions.”