Thin film PZT promises piezoelectric performance

The French consulting company interviewed the world's leading supplier of PZT Sol-Gel materials, Mitsubishi Materials (MMC) and its partner, SCREEN Semiconductor Solutions. Both companies highlight the importance of thin film PZT technology for MEMS companies and detail their collaboration.

MMC works with its MEMS customers and takes into account their requirements. For example, MMC developed a new PZT-N solution allowing the MEMS companies to reduce the multi-step deposition of Sol-Gel PZT.

Thin film PZT deposition integration is complex for piezoelectric MEMS device manufacturing, and only few companies have been successful in stabilising their process.

MMC aims for a global solution that combines chemicals and equipment. The aim of this approach is to define all conditions of deposition and propose a combined and turnkey solution. SCREEN Semiconductor Solutions is closely working with MMC to develop the related equipment, a Sol-Gel coater and an IR lamp annealer. MMC’s partner creates equipment dedicated to PZT Sol-Gel mass production and uses the best process conditions for MMC solution.

According to SCREEN, good uniformity, high productivity and optimisation for best process conditions are key to offering the best solutions to MEMS companies. Over the years, MMC and SCREEN have built a relationship of trust through various co-operations dedicated to Sol-Gel PZT evaluations, in real conditions.

Last December, Yole Développement released its technology and market report, ‘Thin Film PZT for Semiconductor Application Trends & Technology Update’. Under this analysis, Claire Troadec, Technology & Market Analyst, Semiconductor Manufacturing at Yole Développement explained: “Thin film PZT has been used for years in the manufacturing of FeRam and also integrated passive devices. In 2013, this market reached $286m, with a CAGR of more than 5% for the next 5 years”.

In addition to such applications, MEMS players are also considering thin film PZT for multiple applications. Fujifilm Dunatix and Epson with inkjet heads are examples, as are Panasonic and Silicon Sensing Systems with their gyroscopic applications.

In its report, Yole Développement also identified emerging MEMS applications: “Today, auto-focus, infra-red detectors, hard disc heads, pumps and valves for microfluidics represent real business opportunities for industrials. They require effective actuators and micro-mirrors that could take full benefit of the PZT properties”, said Dr Eric Mounier, Senior Technology & Market Analyst, Yole Développement.

In 2013, MEMS thin film PZT applications represented a combined market of $350m, however, despite promising business developments, such applications are still waiting for a simpler method for processing thin film PZT.